Stan Shihyao Chou

Materials Science and Engineering
Northwestern University
Cook Hall, Rm 1141
2220 Campus Drive
Evanston IL, 60208-3108

Phone:	(847) 491-7798 (L)
Facsimile:	(847) 467-6573

Email: s-chou@northwestern.edu

Research Objectives and Approach

• Scanning Near-Field Ultrasound Holography (SNFUH)
• Establish non-destructive failure analysis technique.
• Model and characterize capability.
• Soft material subsurface characterization using SNFUH techniques (ex. soft dielectric materials).
• MOSFET embedded SNFUH tip array (design and fabrication)
• Design and fabrication of SNFUH-AFM probe array to enable individual probe actuation, and parallel scan/detection capability.
• Establish micromachine fabrication process for in-house production and experimentation.
• Establish MOS-cantilever modeling in relation individual cantilever actuation.

References

• G.S. Shekhawat, S.H. Tark, and V. P. Dravid, "MOSFET-Embedded Microcantilevers for Measuring Deflection in Biomolecular Sensors," Science, 311: 1592 (2006)
• G. S. Shekhawat and V. P. Dravid, "Nanoscale Imaging of Buried Structures via Scanning Near-Field Ultrasound Holography," Science 310(5745): 89 (2005)